Embedding vertical nanosheets into PDMS with a reusable template engineering

Jalabert, Laurent; Fujita, H.; Saito, T.; BenMoussa, A.; Bolsee, D.; Hermans, C.; Kumemura, M.

doi:10.1109/MEMSYS.2010.5442484

Embedding vertical nanosheets into PDMS with a reusable template engineering - Jalabert, Laurent et al - published in Proc. 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010), Hong-Kong 24-28 January 2010. , pp. 384-387 (2010) - SIDCimport-414

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