360 20160222141715.0 SIDCimport-403 Malinowski, P. 2009 Radiation hardness of AlxGa1-xN photodetectors exposed to Extreme UltraViolet (EUV) light beam Damage to VUV, EUV, and X-Ray Optics II. Edited by Juha, Libor; Bajt, Saša; Sobierajski, Ryszard. STCE John, J Barkusky, F Duboz, J.-Y. Lorenz, A. Cheng, K. Derluyn, Joff Germain, M. de Moor, Piet Minoglou, Kyriaki Bayer, A. Mann, K. Hochedez, J.-F. Giordanengo, B. Borghs, G. Mertens, R. Proceedings of SPIE 7361 2009 73610T-73610T-8 http://adsabs.harvard.edu/abs/2009SPIE.7361E..22M http://cat.inist.fr/?aModele=afficheN=22128964 published in NONREF