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Science Article (Ref.) 
Embedding vertical nanosheets into PDMS with a reusable template engineering / Jalabert, Laurent ; Saito, T. ; Kumemura, M. ; Bolsee, D. ; et al
published in Proc. 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010), Hong-Kong 24-28 January 2010. , pp. 384-387 (2010) 10.1109/MEMSYS.2010.5442484 [SIDCimport-414]

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