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1.
Science Article 
High performance AlN-based surface acoustic wave sensors on TiN on (100) Silicon substrate / Soltani, A. ; Talbi, A. ; Gerbedoen, J-C ; Mortet, V. ; et al
published in 8th Global Symposium on Millimeter-Waves (GSMM) 2015 Montreal, Quebec, Canada (2015) [SIDCimport-893]

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