Home > Science Articles > Non-refereed Articles > High performance AlN-based surface acoustic wave sensors on TiN on (100) Silicon substrate > BibTeX |
@article{Soltani:779, author = "Soltani, A. and Talbi, A. and Gerbedoen, J-C and Mortet, V. and Maher, H. and Bourzgui, N. and BenMoussa, A.", title = "{High performance AlN-based surface acoustic wave sensors on TiN on (100) Silicon substrate}", year = "2015", }