000000779 001__ 779
000000779 005__ 20160222141720.0
000000779 037__ $$aSIDCimport-893
000000779 100__ $$aSoltani, A.
000000779 245__ $$aHigh performance AlN-based surface acoustic wave sensors on TiN on (100) Silicon substrate
000000779 260__ $$c2015
000000779 594__ $$aSTCE
000000779 700__ $$aTalbi, A.
000000779 700__ $$aGerbedoen, J-C
000000779 700__ $$aMortet, V.
000000779 700__ $$aMaher, H.
000000779 700__ $$aBourzgui, N.
000000779 700__ $$aBenMoussa, A.
000000779 773__ $$p8th Global Symposium on Millimeter-Waves (GSMM) 2015 Montreal, Quebec, Canada$$y2015
000000779 905__ $$apublished in
000000779 980__ $$aNONREF