000000370 001__ 370
000000370 005__ 20160630150318.0
000000370 0247_ $$2DOI$$a10.1109/MEMSYS.2010.5442484
000000370 037__ $$aSIDCimport-414
000000370 100__ $$aJalabert, Laurent
000000370 245__ $$aEmbedding vertical nanosheets into PDMS with a reusable template engineering
000000370 260__ $$c2010
000000370 594__ $$aSTCE
000000370 700__ $$aSaito, T.
000000370 700__ $$aKumemura, M.
000000370 700__ $$aBolsee, D.
000000370 700__ $$aHermans, C.
000000370 700__ $$aBenMoussa, A.
000000370 700__ $$aFujita, H.
000000370 773__ $$c384-387$$pProc. 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010), Hong-Kong 24-28 January 2010. $$y2010
000000370 85642 $$ahttp://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=5442484
000000370 905__ $$apublished in
000000370 980__ $$aREFERD